Method of overlay measurement, lithographic apparatus, inspection apparatus, processing apparatus an

专利摘要:

公开号:NL2004815A
申请号:NL2004815
申请日:2010-06-03
公开日:2010-12-20
发明作者:Arie Boef
申请人:Asml Netherlands Bv；
IPC主号:

专利说明:

METHOD OR OVERLAY MEASUREMENT. LITHOGRAPHIC EQUIPMENT. INSPECTION DEVICE. PROCESSING DEVICE AND LITHOGRAPHIC PROCESSING CELL
Field of the Invention The present invention relates to measurement of overlay useable, for example, in the manufacture of devices by lithographic techniques. Specifically, the present invention relates to measuring a property of a first marker on a substrate, printing a second marker on the substrate including alignment and measuring a lateral overlay or the second marker with respect to the first marker.
Background Art A lithographic apparatus is a machine that applies a desired pattern onto a substrate, usually onto a target portion of the substrate. A lithographic apparatus can be used, for example, in the manufacture of integrated circuits (ICs). In that instance, a patterning device, which is alternatively referred to as a mask or a reticle, may be used to generate a circuit pattern to be formed on an individual layer of the IC. This pattern can be transferred onto a target portion (eg, including part of, one, or several dies) on a substrate (e.g., a silicon wafer). Transfer of the pattern is typically via imaging onto a layer of radiation-sensitive material (resist) provided on the substrate. In general, a single substrate will contain a network of adjacent target portions that are successively patterned. Known lithographic apparatus include so-called steppers, in which each target portion is irradiated by exposing an entire pattern onto the target portion at one time, and so-called scanners, in which each target portion is irradiated by scanning the pattern through a radiation beam in a given direction (the "scanning" direction) while synchronously scanning the substrate parallel or anti-parallel to this direction. It is also possible to transfer the pattern from the patterning device to the substrate by imprinting the pattern onto the substrate.
In order to monitor the lithographic process, it is necessary to measure parameters of the patterned substrate, for example the overlay error between successive layers formed in or on it. There are various techniques for making measurements of the microscopic structures formed in lithographic processes, including the use of scanning electron microscopes and various specialized tools. One form of specialized inspection tool is a scatterometer in which a beam of radiation is directed onto a surface of the substrate and properties of the scattered or reflected beam are measured. By comparing the properties of the beam before and after it has been reflected or scattered by the substrate, the properties of the substrate can be determined. This can be done, for example, by comparing the reflected beam with data stored in a library or known measurements associated with known substrate properties. Two main types or scatterometer are known. Spectroscopic scatterometers directly a broadband radiation beam onto the substrate and measure the spectrum (intensity as a function of wavelength) or the radiation scattered into a particular narrow angular range. Angularly resolved scatterometers use a monochromatic radiation beam and measure the intensity of the scattered radiation as a function of angle.
Devices are built up layer by layer and overlay is a measure of a lithographic apparatus' ability to print these layers accurately on top of each other. Successive layers or multiple processes on the same layer must be accurately aligned to the previous layer, otherwise electrical contact between structures will be poor and the resulting devices will not perform to specification. Overlay is a measure of the accuracy of this alignment. Good overlay improves device yield and allow smaller product patterns to be printed. The overlay error between successive layers formed in or on the patterned substrate is controlled by various parts of the exposure apparatus (or the lithographic apparatus). It is mostly the alignment system of the lithographic apparatus that is responsible for the alignment of the radiation onto the correct portions of the substrate.
Overlay may be measured using an "image-based" (box-in-box) technique or diffraction-based overlay (DBO) metrology. DBO is an emerging metrology technique used because of its superb TMU (Total Measurement Uncertainty) compared to "image-based" techniques. In the "image-based" case, overlay may be derived from a measurement of the position of a resist marker pattern relative to a marker pattern in an earlier formed product layer. In the DBO case, overlay is measured indirectly, for example by detecting variations in diffracted intensities or two overlapping periodic structures such as a top resist grating stacked over a product layer grating.
However, a problem is that the grating in the product layer can become asymmetric due to processing effects. This asymmetry is not directly measurable with known DBO techniques and it introduces an overlay measurement error that can be quite significant (nms). It is important to note that this error does not show up in TMU measurements: one can have excellent TMU (much less than 1nm) and still have large overlay errors due to grating asymmetry. In the "image-based" case, the asymmetry of the product layer pattern may also introduce an overlay measurement error.
Measuring asymmetry in the (bottom) product marker is not restricted to 1-dimensional periodic structures such as gratings. Asymmetry measurement may also be applied to structures that are periodic in two dimensions such as contact holes.
SUMMARY
[0008] According to an embodiment, there is provided a method of measurement or lateral overlay on a substrate of a first marker and a second marker, the method including: measuring on the substrate a property of the first marker that depends on a transverse profile or the first marker; determining, from the measured property of the first marker, information relating to the transverse profile of the first marker; printing, using a lithographic apparatus, the second marker on the substrate including alignment or the second marker on the substrate; measuring a lateral overlay on the substrate or the second marker with respect to the first marker using the determined information.
[0009] According to another embodiment, there is provided a lithographic apparatus for processing a substrate including a first marker to print a second marker on the substrate, the lithographic apparatus including: a measurement apparatus configured to measure a property of the first marker that depends on a transverse profile of the first marker, the measurement apparatus including: a first projection system configured to project a first radiation beam onto the first marker; a first detector configured to detect first radiation from the first marker; and a first processor configured to determine the property of the first marker using the detected first radiation, the lithographic apparatus further comprising an alignment system configured to control alignment or the second marker on the substrate using the first detector as an alignment sensor; and a second processor configured to determine, from the measured property of the first marker, information related to the transverse profile of the first marker and to output the information from the lithographic apparatus.
[0010] According to another embodiment, there is provided an inspection apparatus for measuring lateral overlay on a substrate of a first marker and a second marker, the inspection apparatus including: a second projection system configured to project a second radiation beam onto the first and second markers; a second detector configured to detect second radiation having interacted with the first and second markers; a third processor configured to determine the lateral overlay using the detected second radiation; and an information receiving module configured to receive information related to the transverse profile of the first marker, the inspection apparatus is configured to measure a lateral overlay on the substrate or the second marker with respect to the first marker using the received information.
[0011] According to another embodiment, there is provided a processing apparatus for processing or lateral overlay on a substrate or a first marker and a second marker, the processing apparatus including: a marker property receiving module configured to receive a measured property of the first marker that depends on a transverse profile of the first marker; a measurement receiving module configured to receive a lateral overlay measurement of the first and second markers; and a processor configured to determine, from the received measured property of the first marker, information related to the transverse profile of the first marker and to determine a lateral overlay on the substrate of the second marker with respect to the first marker using the received overlay measurement and the determined information.
[0012] According to another embodiment, there is a lithographic processing cell including: a lithographic apparatus for processing a substrate including a first marker to print a second marker on the substrate, the lithographic apparatus including: a measurement apparatus configured to measure a property or the first marker that depends on a transverse profile of the first marker, the measurement apparatus including: a first projection system configured to project a first radiation beam onto the first marker; a first detector configured to detect first radiation from the first marker; and a first processor configured to determine the property of the first marker using the detected first radiation, the lithographic apparatus further including: an alignment system configured to control alignment of the second marker on the substrate using the first detector as an alignment sensor; and a second processor configured to determine, from the measured property of the first marker, information related to the transverse profile of the first marker and to output the information from the lithographic apparatus, the lithographic processing cell further including: an inspection apparatus for measuring lateral overlay on the substrate of the first and second marker, the inspection apparatus including: a second projection system configured to project a second radiation beam onto the first and second markers; a second detector configured to detect second radiation having interacted with the first and second markers; a third processor configured to determine the lateral overlay using the detected second radiation; and an information receiving module configured to receive the information from the lithographic apparatus, the inspection apparatus is configured to measure a lateral overlay on the substrate or the second marker with respect to the first marker using the received information.
[0013] According to another embodiment, there is provided a computer program product containing one or more sequences of machine-readable instructions, the instructions being adapted for controlling measuring and determining, in particular to cause one or more programmable processors to: receive a measured property of the first marker that depends on a transverse profile of the first marker; determine, from the received measured property of the first marker, information relating to the transverse profile of the first marker; and measure a lateral overlay on the substrate or the second marker with respect to the first marker using the determined information.
[0014] According to another embodiment, there is provided a computer program product containing one or more sequences of machine-readable instructions, the instructions being adapted for controlling the lithographic apparatus, in particular to cause one or more programmable processors to: receive a measured property of the first marker that depends on a transverse profile of the first marker; and determine, from the received measured property of the first marker, information related to the transverse profile of the first marker and to output the information from the lithographic apparatus.
[0015] According to another embodiment, there is provided a computer program product containing one or more sequences of machine-readable instructions, the instructions being adapted for controlling the inspection apparatus, in particular to cause one or more programmable processors to: receive information relation to the transverse profile or the first marker; and measure a lateral overlay on the substrate or the second marker with respect to the first marker using the received information.
[0016] According to another embodiment, there is provided a computer program product containing one or more sequences of machine-readable instructions for processing or lateral overlay on a substrate or a first marker and a second marker, the instructions being adapted to cause one or more processors to: receive a measured property of the first marker that depends on a transverse profile of the first marker; receive a lateral overlay measurement of the first and second markers; determine, from the received measured property of the first marker, information relating to the transverse profile of the first marker; and determine a lateral overlay on the substrate of the second marker with respect to the first marker using the received overlay measurement and the determined information.
Further features and advantages of the invention, as well as the structure and operation of various various of the invention, are described in detail below with reference to the accompanying drawings. It is noted that the invention is not limited to the specifically described described. Such others are presented for illustrative purposes only. Additional others will be apparent to persons skilled in the relevant art (s) based on the teachings contained.
LETTER DESCRIPTION OF THE DRAWINGS / FIGURES
[0018] The accompanying drawings, which are included and form part of the specification, illustrate the present invention and, together with the description, further serve to explain the principles of the invention and to enable a person skilled in the relevant art (s) ) to make and use the invention.
Figure 1 depicts a lithographic apparatus.
Figure 2 depicts a lithographic cell or cluster.
Figure 3 depicts a first scatterometer.
Figure 4 depicts a second scatterometer.
Figure 5 depicts a lithographic cell according to an embodiment of the present invention.
Figure 6 depicts a flowchart or method of measuring overlay according to an embodiment of the present invention.
Figure 7 depicts the profile of product marker structures having an identical asymmetric profile coming from two different processes.
Figure 8 depicts the profile of the stacked marker structure before exposure of the overlay grating and after developer.
Figure 9 depicts a computer assembly that may be used in apparatus according to an embodiment of the present invention.
The features and advantages of the present invention will become more apparent from the detailed description set forth below when tasks in conjunction with the drawings, in which like reference characters identify corresponding elements throughout. In the drawings, like reference numbers generally indicate identical, functionally similar, and / or structurally similar elements. The drawing in which an element first appears is indicated by the leftmost digit (s) in the corresponding reference number.
DETAILED DESCRIPTION
This specification discloses one or more features that incorporate the features of this invention. The disclosed embodiment (s) merely exemplify the invention. The scope of the invention is not limited to the disclosed embodiment (s). The invention is defined by the clauses appended hereto.
The embodiment (s) described, and references in the specification to "one embodiment", "an embodiment", "an example embodiment", etc., indicate that the embodiment (s) described may include a particular feature, structure , or characteristic, but every embodiment may not necessarily include the particular feature, structure, or characteristic. Moreover, such phrases are not necessarily referring to the same embodiment. Further, when a particular feature, structure, or characteristic is described in connection with an embodiment, it is understood that it is within the knowledge of one skilled in the art to effect such a feature, structure, or characteristic in connection with other is what or not explicitly described.
Embodiments of the invention may be implemented in hardware, firmware, software, or any combination thereof. Embodiments of the invention may also be implemented as instructions stored on a machine-readable medium, which may be read and executed by one or more processors. A machine-readable medium may include any mechanism for failure or transmitting information in a form readable by a machine (e.g., a computing device). For example, a machine-readable medium may include read-only memory (ROM); random access memory (RAM); magnetic disk storage media; optical storage media; flash memory devices; electrical, optical, acoustic or other forms of propagated signals (e.g., carrier waves, infrared signals, digital signals, etc.), and others. Further, firmware, software, routines, instructions may be described as performing certain actions. Flowever, it should be appreciated that such descriptions are merely for convenience and that such actions result in computing devices, processors, controllers, or other devices executing the firmware, software, routines, instructions, etc.
Before describing such in more detail, however, it is instructive to present an example of the environment in which present or the present invention may be implemented.
Figure 1 schematically depicts a lithographic apparatus. The apparatus comprises an illumination system (illuminator) IL configured to condition a radiation beam B (eg, UV radiation or DUV radiation), a support structure (eg, a mask table) MT constructed to support a patterning device (eg, a mask) MA and connected to a first positioner PM configured to accurately position the patterning device in accordance with certain parameters, a substrate table (eg, a wafer table) WT constructed to hold a substrate (eg, a resist-coated wafer) W and connected to a second positioner PW configured to accurately position the substrate in accordance with certain parameters, and a projection system (eg, a refractive projection lens system) PL configured to project a pattern imparted to the radiation beam B by patterning device MA onto a target portion C (eg, including one or more dies) or the substrate W.
The illumination system may include various types of optical components, such as refractive, reflective, magnetic, electromagnetic, electrostatic or other types of optical components, or any combination thereof, for directing, shaping, or controlling radiation.
The support structure supports, i.e., bears the weight of, the patterning device. It holds the patterning device in a manner that depends on the orientation of the patterning device, the design of the lithographic apparatus, and other conditions, such as for example whether or not the patterning device is a hero in a vacuum environment. The support structure can use mechanical, vacuum, electrostatic or other clamping techniques to hold the patterning device. The support structure may be a frame or a table, for example, which may be fixed or movable as required. The support structure may ensure that the patterning device is at a desired position, for example with respect to the projection system. Any use of the terms "reticle" or "mask" may be considered synonymous with the more general term "patterning device." The term "patterning device" used should be broadly interpreted as referring to any device that can be used to impart a radiation beam with a pattern in its cross-section such as to create a pattern in a target portion of the substrate . It should be noted that the pattern imparted to the radiation beam may not exactly correspond to the desired pattern in the target portion of the substrate, for example if the pattern includes phase-shifting features or so called assist features. Generally, the pattern imparted to the radiation beam will correspond to a particular functional layer in a device being created in the target portion, such as an integrated circuit.
The patterning device may be transmissive or reflective. Examples of patterning devices include masks, programmable mirror arrays, and programmable LCD panels. Masks are well known in lithography, and include mask types such as binary, alternating phase shift, and attenuated phase shift, as well as various hybrid mask types. An example of a programmable mirror array employs a matrix arrangement of small mirrors, each of which can be individually tilted so as to reflect an incoming radiation beam in different directions. The tilted mirrors impart a pattern in a radiation beam, which is reflected by the mirror matrix.
The term "projection system" used should be broadly interpreted as encompassing any type of projection system, including refractive, reflective, catadioptric, magnetic, electromagnetic and electrostatic optical systems, or any combination thereof, as appropriate for the radiation exposure being used, or for other factors such as the use of an immersion liquid or the use of a vacuum. Any use of the term "projection lens" may also be considered as synonymous with the more general term "projection system".
As depicted here, the apparatus is of a transmissive type (e.g., employing a transmissive mask). Alternatively, the apparatus may be of a reflective type (e.g., employing a programmable mirror array or a type referred to above, or employing a reflective mask).
The lithographic apparatus may be of a type having two (dual stage) or more substrate tables (and / or two or more mask tables). In such "multiple stage" machines the additional tables may be used in parallel, or preparatory steps may be carried out on one or more tables while one or more other tables are being used for exposure.
The lithographic apparatus may also be a type of at least a portion of the substrate may be covered by a liquid having a relatively high refractive index, eg, water, so as to fill a space between the projection system and the substrate . Liquid immersion may also be applied to other spaces in the lithographic apparatus, for example, between the mask and the projection system. Immersion techniques are well known in the art for increasing the numerical aperture of projection systems. The term "immersion" as used does not mean that a structure, such as a substrate, must be submerged in liquid, but rather only means that liquid is located between the projection system and the substrate during exposure.
Referring to Figure 1, the illuminator IL receives a radiation beam from a radiation source SO. The source and the lithographic apparatus may be separate entities, for example when the source is an excimer laser. In such cases, the source is not considered to be part of the lithographic apparatus and the radiation beam is passed from the source SO to the illuminator IL with the aid of a beam delivery system BD including, for example, suitable directing mirrors and / or a beam expander. In other cases the source may be an integral part of the lithographic apparatus, for example when the source is a mercury lamp. The source SO and the illuminator IL, together with the beam delivery system BD if required, may be referred to as a radiation system.
The illuminator IL may comprise an adjuster AD for adjusting the angular intensity distribution of the radiation beam. Generally, at least the outer and / or inner radial extent (commonly referred to as σ-outer and σ-inner, respectively) or the intensity distribution in a pupil plane or the illuminator can be adjusted. In addition, the illuminator IL may include various other components, such as an integrator IN and a condenser CO. The illuminator may be used to condition the radiation beam, to have a desired uniformity and intensity distribution in its cross-section.
The radiation beam B is incident on the patterning device (e.g., mask MA), which is a hero on the support structure (e.g., mask table MT), and is patterned by the patterning device. Having traversed the mask MA, the radiation beam B passes through the projection system PL, which beam the beam onto a target portion C or the substrate W. With the aid of the second positioner PW and position sensor IF (eg, an interferometric device, linear encoder, 2-D encoder or capacitive sensor), the substrate table WT can be moved accurately, eg, so as to position different target portions C in the path of the radiation beam B. Similarly, the first positioner PM and another position sensor (which is not explicitly depicted in Figure 1) can be used to accurately position the mask MA with respect to the path of the radiation beam B, eg, after mechanical retrieval from a mask library, or during a scan. In general, movement of the mask table MT may be realized with the aid of a long-stroke module (coarse positioning) and a short-stroke module (fine positioning), which form part of the first positioner PM. Similarly, movement of the substrate table WT may be realized using a long-stroke module and a short-stroke module, which form part of the second positioner PW. In the case of a stepper (as opposed to a scanner) the mask table MT may be connected to a short-stroke actuator only, or may be fixed. Mask MA and substrate May be aligned using mask alignment marks M1, M2 and substrate alignment marks P1, P2. Although the substrate alignment marks as illustrated occupy dedicated target portions, they may be located in spaces between target portions (these are known as scribe-lane alignment marks). Similarly, in situations in which more than one that is provided on the mask MA, the mask alignment marks may be located between the dies.
The depicted apparatus could be used in at least one of the following modes: 1. In step mode, the mask table MT and the substrate table WT are kept essentially stationary, while an entire pattern imparted to the radiation beam is projected onto a target portion C at one time (ie "a single static exposure). The substrate table WT is then shifted in the X and / or Y direction so that a different target portion can be exposed. In step mode, the maximum size of the exposure field limits the size of the target portion C imaged in a single static exposure 2. In scan mode, the mask table MT and the substrate table WT are scanned synchronously while a pattern is transmitted to the radiation beam projected onto a target portion C (ie, a single dynamic exposure) The velocity and direction of the substrate table WT relative to the mask table MT may be determined by the (de-) magnification and image reversal characteristics of the projection system PL. maximum size of the exposure field limits the width (in the non-scanning direction) or the target portion in a single dynamic exposure, whereas the length of the scanning motion determines the height (in the scanning direction) or the target portion. 3. In another mode, the mask table MT is kept essentially stationary holding a programmable patterning device, and the substrate table WT is moved or scanned while a pattern is imparted to the radiation beam is projected onto a target portion C. In this mode, generally a pulsed radiation source is employed and the programmable patterning device is updated as required after each movement of the substrate table WT or in between successive radiation pulses during a scan. This mode of operation can be readily applied to maskless lithography that utilizes programmable patterning device, such as a programmable mirror array or a type as referred to above.
Combinations and / or variations on the modes described above or use or entirely different modes or use may also be employed.
As shown in Figure 2, the lithographic apparatus LA forms part of a lithographic cell LC, also sometimes referred to a lithocell or cluster, which also includes apparatus for perform pre-and post-exposure processes on a substrate. Conventionally these include spin coaters SC to deposit resist layers, developers DE to develop exposed resist, chill plates CH and bake plates BK. A substrate handler, or robot, RO picks up substrates from input / output ports 1/01, I / 02, moves them between the different process apparatus and delivers then to the loading bay LB of the lithographic apparatus. These devices, which are often collectively referred to as the track, are under the control of a track control unit TCU which is itself controlled by the supervisory control system SCS, which also controls the lithographic apparatus via the LACU lithography control unit. Thus, the different apparatus can be operated to maximize throughput and processing efficiency.
[0048] In order that the substrates that are exposed by the lithographic apparatus are exposed correctly and consistently, it is desirable to inspect exposed substrates to measure properties such as overlay errors between subsequent layers, line thicknesses, critical dimensions (CD), etc. If errors are detected, adjustments may be made to exposures or subsequent substrates, especially if the inspection can be done soon and fast enough that other substrates or the same batch are still exposed. Also, already exposed substrates may be stripped and reworked - to improve yield - or discarded, otherwise avoiding performing exposures on substrates that are known to be faulty. In a case where only some target portions or a substrate are faulty, further exposures can be performed only on those target portions which are good.
An inspection apparatus is used to determine the properties of the substrates, and in particular, how the properties of different substrates or different layers of the same substrate vary from layer to layer. The inspection apparatus may be integrated into the lithographic apparatus LA or the lithocell LC or may be a stand-alone device. To enable most rapid measurements, it is desirable that the inspection apparatus measure properties in the exposed resist layer immediately after the exposure. However, the latent image in the resist has a very low contrast - there is only a very small difference in refractive index between the parts of the resist which have been exposed to radiation and those which have not - and not all inspection apparatus have sufficient sensitivity to make useful measurements of the latent image. Therefore measurements may be tasks after the post-exposure bake step (PEB) which is customarily the first step carried out on exposed substrates and increases the contrast between exposed and unexposed parts of the resist. At this stage, the image in the resist may be referred to as semi-latent. It is also possible to make measurements of the developed resist image - at which point either the exposed or unexposed parts of the resist have been removed - or after a pattern transfer step such as etching. The latter possibility limits the possibilities for rework or faulty substrates but may still provide useful information.
Figure 3 depicts a scatterometer SM1 which may be used in the present invention. It comprises a broadband (white light) radiation projector 2 which projects radiation onto a substrate W. The reflected radiation is passed to a spectrometer detector 4, which measures a spectrum 10 (intensity as a function of wavelength) or the specular reflected radiation. From this data, the structure or profile giving rise to the detected spectrum may be reconstructed by processing unit PU, eg, by Rigorous Coupled Wave Analysis and non-linear regression or by comparison with a library of simulated spectra as shown at the bottom of Figure 3. In general, for the reconstruction the general form of the structure is known and some parameters are assumed from knowledge of the process by which the structure was made, leaving only a few parameters of the structure to be determined from the scatterometry data. Such a scatterometer may be configured as a normal-incidence scatterometer or an oblique-incidence scatterometer.
Another scatterometer SM2 that may be used with the present invention is shown in Figure 4. In this device, the radiation emitted by radiation source 2 is focused using lens system 12 through interference filter 13 and polarizer 17, reflected by partially reflected surface 16 and is focused on substrate W via a microscope objective lens 15, which has a high numerical aperture (NA), preferably at least 0.9 and more preferably at least 0.95. Immersion scatterometers may have lenses with numerical apertures over 1. The reflected radiation then transmits through partially reflective surface 16 into a detector 18 in order to have the scatter spectrum detected. The detector may be located in the back-projected pupil plane 11, which is at the focal length of the lens system 15, however the pupil plane may instead be imaged with auxiliary optics (not shown) onto the detector. The pupil plane is the plane in which the radial position of radiation defines the angle of incidence and the angular position defines azimuth angle of the radiation. The detector is preferably a two-dimensional detector so that a two-dimensional angular scatter spectrum or a substrate target 30 can be measured. The detector 18 may be, for example, an array or CCD or CMOS sensors, and may use an integration time or, for example, 40 milliseconds per frame.
A reference beam is often used for example to measure the intensity of the incident radiation. To do this, when the radiation beam is incident on the beam splitter 16 part of it is transmitted through the beam splitter as a reference beam towards a reference mirror 14. The reference beam is then projected onto a different part of the same detector 18.
A set of interference filters 13 is available to select a wavelength of interest in the range or, say, 405 - 790 nm or even lower, such as 200 - 300 nm. The interference filter may be tunable rather than including a set of different filters. A grating could be used instead of interference filters.
The detector 18 may measure the intensity of scattered light at a single wavelength range, or the intensity separately at multiple wavelengths or integrated over a wavelength range. Furthermore, the detector may separately measure the intensity of transverse magnetic and transverse electric-polarized light and / or the phase difference between the transverse magnetic and transverse electric-polarized light.
Using a broadband light source (i.e., one with a wide range of light frequencies or wavelengths - and therefore of colors) is possible, which gives a large etendue, allowing the mixing or multiple wavelengths. The variety of wavelengths in the broadband preferably each has a bandwidth or Δλ and a spacing or at least 2Δλ (i.e., twice the bandwidth). Several "sources" or radiation can be different portions or an extended radiation source which have been split using fiber bundles. In this way, angle resolved scatter spectra can be measured at multiple wavelengths in parallel. A 3-D spectrum (wavelength and two different angles) can be measured, which contains more information than a 2-D spectrum. This allows more information to be measured which increases metrology process robustness. This is described in more detail in EP1,628,164A, which is incorporated by reference in its entirety.
The target 30 on substrate May be (a) a resist layer grating, which is printed such that after development, the bars are formed or solid resist lines, or (a) a product layer grating, or (a) a composite grating stack in an overlay target structure including a resist grating overlaid or interleaved on a product layer grating. The bars may alternatively be etched into the substrate. This pattern is sensitive to chromatic aberrations in the lithographic projection apparatus, particularly the projection system PL, and illumination symmetry and the presence of such aberrations will manifest themselves in a variation in the printed grating. Due, the scatterometry data or the printed gratings is used to reconstruct the gratings. The parameters of the grating, such as line widths and shapes, may be input to the reconstruction process, performed by processing unit PU, from knowledge of the printing step and / or other scatterometry processes.
The present invention relates to expander or measurement or lateral overlay. In one embodiment, overlay measurement is made on a structure with a first marker and second marker. A property of the first marker, such as position variations for various wavelengths, is measured by scatterometry. The property is one that depends on a transverse profile or the first marker. The transverse profile may have an asymmetry or a shape that affects the measured property. Information related to the transverse profile of the first marker, such as asymmetry information, is determined from the measured property. After printing or the second marker, the overlay measurement is performed using the determined information. This has the effect of correcting the measured overlay for the effect of the transverse profile of the first marker. For example, overlay error is corrected for the effect of product grating asymmetry.
A DBO technique described in U.S. Published Patent Application 2006/0066855 A1, which is included by reference, involves the use of multiple gratings where a deliberate overlay shift (or bias) has been added to the unknown overlay error.
With reference to Figure 5, the exposure or lithographic apparatus LA and lithographic cell LC process a batch of input wafers 81 through various steps 82 to 87 to a set of output wafers 88. A wafer introduced into the track 82 is processed through spin coating step 83 before passing into the exposure apparatus LA. In the alignment step 84, the phase grating alignment sensor 89 projects a beam of light onto the product layer grating 90 on the wafer and detects the light scattered by the grating. The phase grating alignment sensor is a special child or scatterometer in that it derives position information by measuring the phase difference between diffraction orders that are diffracted by the pattern on the substrate. This is what distinguishes an alignment sensor from a typical scatterometer since a typical scatterometer normally measures only intensity or polarization state of diffracted orders without considering the phase difference between different diffraction orders.
The asymmetry processor 91 rated the asymmetry of the product grating from the properties of the scattered light and feeds information about the product grating asymmetry forward to the subsequent overlay measurement. The wafer 85 is exposed with an overlay marker along with a product pattern and the resist has been developed 86 to print the overlay marker on the wafer stacked on top of the product grating.
The asymmetry information is fed forward to the overlay calculation processor 92. The overlay calculation processor 92 has a receiving module 93 that receives the information about the product grating asymmetry. The information may include a model of the product grating profile constructed by the asymmetry processor 91. Alternatively, the overlay calculation processor 92 may itself construct a model of the product grating profile using the received information about the product grating asymmetry. In either case, the overlay calculation processor 92 constructs a model of the stacked product and overlay grating profile using or incorporating a model of the product grating profile. The stack model is then used to determine the overlay offset and us of the asymmetry information minimizes the effect of the asymmetry on the overlay offset measurement.
The metrology tool or inspection apparatus comprises scatterometer opto-mechanical sensor hardware 94 that projects a beam of light onto the stacked product and resist grating on the wafer. It detects the light that has interacted with the product and overlay gratings by scattering.
In one embodiment, the scatterometer sensor hardware 94 has an interface 95 that receives control signals from the overlay calculation processor 92. The instructions cause the scatterometer sensor 94 to adjust its measurement settings. The asymmetry information is thus used by the calculation processor to configure the wavelength and / or polarization of the beam of light so to minimize the effect of the asymmetry on the overlay measurement. In addition, or alternatively, the information may be used to configure the detector in the scatterometer for the same purpose.
The overlay calculation processor 92 rated the overlay from the properties of the scattered light detected in the scatterometer sensor hardware 92. The overlay offset data is fed to a controller 96 that feeds back to the feedback receiving module 97 of the exposure apparatus LA for correction of errors in the overlay, for example by feeding corrections into the alignment system.
Thus, the product layer gratings 90 on the wafer are measured with the alignment sensor 89 before the resist is exposed at step 85. These product layer gratings 90 may also be used for wafer alignment.
The measurement by the alignment sensor 89 at step 84 may include one or more of the following measurements that are indicative of the presence of grating asymmetry: 1. measuring position variations for various wavelengths (position shift between colors); 2. measuring position variations for various orders (position shift between diffraction orders); and 3. measuring position variations for various polarizations (position shift between polarizations).
This data can for example be obtained with any type of alignment sensor, for example a SMASH (SMart Alignment Sensor Hybrid) sensor, as described in U.S. Pat. Patent No. 6,961,116, which is incorporate by reference in its entirety, that employs a self-referencing interferometer with a single detector and four different wavelengths, and extracts the alignment signal in software, or Athena (Advanced Technology using High order ENhancement of Alignment), as described in US Patent No. 6,297,876, which is incorporated by reference in its entirety, which directs each or seven diffraction orders to a dedicated detector.
In addition to the measured asymmetry data, the sensor may also acquire other information that allows identification of the type and amount of asymmetry that is present in the processed grating: 1. diffracted intensity and / or polarization state as a function of diffraction angle / order, including for multiple input polarizations; and 2. diffracted intensity and / or polarizations state as a function of wavelength, including for multiple polarizations of the illumination light.
This measured information is used to characterize the product layer grating asymmetry. This characterization may be a reconstruction of the grating profile using the same or similar techniques to those that are used in scatterometry. As discussed above, the measured product layer grating asymmetry is fed forward to the metrology tool 91 where it is used to correctly the overlay metrology error that has been introduced by the asymmetric bottom product layer grating. For this correction a process model is also used to obtain the correct position of the processed grating as discussed below with reference to Figure 7. Examples of process models are models that predict the magnitude and shape of dishing and erosion that has been introduced by a CMP ( Chemical Mechanical Polishing process or models that predict the shape of an etched profile that has been introduced by an etch process. These process models can be empirical or based on theory.
The overlay may be obtained from the light scattered from the composite grating stack of a resist grating on top of a processed grating using the information obtained from the alignment sensor that measured only the processed grating. This results in a more robust measurement of the overlay since the asymmetry that has been introduced by the processed grating can be correctly tasks into account.
The wafer needs to be measured by an alignment sensor in order to align the wafer, so if performed by the alignment sensor, this product layer grating asymmetry measurement can be achieved without a significant penalty in additional metrology time.
The overlay calculation processor 92 may be incorporated in a metrology tool with the scatterometer 94. An alternative embodiment of the present invention is a lithographic apparatus with the asymmetry processor 91 incorporated in it. Another embodiment is an overlay processor for use with conventional lithographic apparatus and metrology tools, having a module 98 to receive measurements of the product marker, for example from a lithographic apparatus, and a module 99 to receive overlay measurements of the first and the second marker , for example from a scatterometer, and a processor performing the functions of the asymmetry processor 91 and the overlay calculation processor 92.
Figure 6 depicts a flow chart 20 or a method of measuring overlay offset according to an embodiment of the present invention. The method has the following steps starting with a wafer including product marker gratings and coated with resist: measuring 21 a property of one or more product marker gratings on a substrate, by: projecting a radiation beam onto the product markers; detecting radiation from the product markers; and determining the property of the product markers using the detected radiation; determining 22, from the measured property, information related to the transverse profile of the product marker grating, such as its asymmetry; printing 23 an overlay marker grating on a resist film using the lithographic apparatus, including alignment of the overlay marker grating to the substrate; measuring 24 the lateral overlay on the substrate of the overlay marker grating with respect to the product marker grating by using the determined asymmetry information in combination with a suitable process model and by: projecting a radiation beam onto the marker stack; detecting radiation having interacted with the marker stack; and determining the overlay using the detected radiation. The overlay may then, optionally, be fed back to the lithography apparatus for correction of overlay errors.
The product layer gratings 90 on the wafer can be measured with the alignment sensor 89 during alignment and before the resist is exposed at step 85. This is both time efficient and has the advantage of measuring the product layer gratings in their final form just before exposure of the overlay grating. However it is also possible to perform measurement of the product layer gratings at other times, for example: before or after alignment (using the alignment sensor); between coat and expose (using a different sensor and an extra metrology step); before coat (using a different sensor and an additional metrology step); and at an earlier step when the product layer is inspected, e.g., at AEI (After Etch Inspection), even though not all layers may be deposited yet (using a different sensor and an additional metrology step).
Figure 7 schematically depicts identical asymmetrical profiles or product marker structures arising from two different processes. When a grating is asymmetric its position is no longer uniquely defined. For an asymmetrically processed grating, the actual position may be determined by taking into consideration the physical mechanism that has given rise to the grating deformation. In particular, a certain process can affect the left edge and right edge or a grating differently. Without a model of the process, it is difficult to determine the true position. However, considering the underlying physical processes that give rise to this left-right difference, it is possible to derive the correct position by using both the process model and the measured information obtained from the alignment sensor.
Figure 7 illustrates how a process model can aid in determining the true position. The solid lines 40 and 41 are identical asymmetrical profiles each or one trench in a product marker grating. Different processes can give rise to different definition of the true position for each identical asymmetrical profile 40 and 41. The true position of profile 40 is the dotted line 42. In this case a first process has added material 43 to the right edge 44 only. The true position of profile 41 is the dotted line 45. In this case a second process has removed material 46 from only the right edge 47.
Figure 8 depicts the profile of a portion of the stacked marker structure before exposure of the overlay grating 30 and after developer 31 (which are also shown in Figure 5). Figure 7, a cross section or just one bar in a grating is shown. The substrate 32 has various layers 33.34 underlying the product marker 35, which has an asymmetric profile. The product marker 35 is covered with layers 36, 37 upon which resist layer 38 is deposited. After the exposure and develop steps, the overlay marker 39 is formed. Examples of product markers 35are: copper lines embedded in oxide; trenches etched in silicon; and polysilicon ridges in oxide. Examples of the layers 33, 24, 36 and 37 are BARC (Bottom Anti Reflection Coating) and hardmask layers such as amorphous carbon and TEOS (TetraEthyl OorthoSilicate).
In embodiment of the present invention, alignment sensor data is used to first reconstruct the bottom product grating and this information is fed forward to the scatterometer that measures the stack of product and resist grating. Without this feeding forward, the very complicated task of reconstructing the stack is not practical, which is why the known techniques are used that have multiple gratings where a deliberate overlay shift (or bias) has been added. As mentioned above, those techniques consume extra real estate. The feeding forward of the present invention allows model-based overlay where only one set or overlap resist and product gratings is required and light scattered by the stack is used for reconstruction or a model of the stack. As well as allowing efficient calculation of overlay, this saves scribe line real estate.
[0079] It should be understood that the asymmetry processor 91 and the overlay calculation processor 92 may be implemented in one or more computer assembly 60 as shown in Figure 9. The computer assembly 60 may be a dedicated computer in the form of an asymmetry processor 91 or an overlay calculation processor 92 in accordance with the invention or, alternatively, be a central computer controlling the lithographic apparatus. The computer assembly 60 may be arranged for loading a computer program product including computer executable code. This may enable the computer assembly 60, when the computer program product is downloaded, to control aforementioned uses or lithographic and inspection apparatuses.
The memory 29 connected to processor 27 may include a number of memory components such as a hard disk 31, Read Only Memory (ROM) 62, Electrically Erasable Programmable Read Only Memory (EEPROM) 63 or Random Access Memory (RAM) 64. Not all aforementioned memory components need to be present. Furthermore, it is not essential that aforementioned memory components are physically close to the processor 27 or to each other. They may be located at a distance away.
The processor 27 may also be connected to some kind of user or user interface, for instance a keyboard 65 or a mouse 66. A touch screen, track ball, speech converter or other interfaces that are known to persons skilled in the art may also be used.
The processor 27 may be connected to a reading unit 67, which is arranged to read data, eg, in the form of computer executable code, from and under some circumstances store data on a data carrier, like a floppy disc 68 or a CDROM 69. Also DVDs or other data carriers known to persons skilled in the art may be used.
The processor 27 may also be connected to a printer 70 to print out output data on paper as well as to a display 71, for instance a monitor or LCD (Liquid Crystal Display), or any other type or display known to a person skilled in the art.
The processor 27 may be connected to a communications network 72, for a public switched telephone network (PSTN), a local area network (LAN), a wide area network (WAN), etc. by means of transmitters / receivers 73 responsible for input / output (I / O). The processor 27 may be arranged to communicate with other communication systems via the communications network 72. In an embodiment of the invention external computers (not shown), for instance personal computers or operators, can log into the processor 27 via the communications network 72.
The processor 27 may be implemented as an independent system or as a number of processing units that operate in parallel, each processing unit is arranged to execute sub-tasks or a larger program. The processing units may also be divided into one or more main processing units with several subprocessing units. Some processing units or the processor 27 may be located a distance away from the other processing units and communicate via communications network 72.
Although specific reference may be made in this text to the use of lithographic apparatus in the manufacture of ICs, it should be understood that the lithographic apparatus described may have other applications, such as the manufacture of integrated optical systems, guidance and detection patterns for magnetic domain memories, flat-panel displays, liquid-crystal displays (LCDs), thin film magnetic heads, etc .. The skilled artisan will appreciate that, in the context of such alternative applications, any use of the terms "wafer "or" die "Read may be considered as synonymous with the more general terms" substrate "or" target portion ", respectively. The substrate referred to may be processed, before or after exposure, in for example a track (a tool that typically applies to a layer of resist to a substrate and develops the exposed resist), a metrology tool and / or an inspection tool. Where applicable, the disclosure may be applied to such and other substrate processing tools. Further, the substrate may be processed more than once, for example in order to create a multi-layer 1C, so that the term substrate used may also refer to a substrate that already contains multiple processed layers.
Although specific reference may have been made above to the use of the invention in the context of optical lithography, it will be appreciated that the invention may be used in other applications, for example imprint lithography, and where the context allows , is not limited to optical lithography. In imprint lithography a topography in a patterning device the pattern created on a substrate. The topography of the patterning device may be pressed into a layer or resist supplied to the substrate whereupon the resist is cured by applying electromagnetic radiation, heat, pressure or a combination thereof. The patterning device is moved out of the resist leaving a pattern in it after the resist is cured.
The terms "radiation" and "beam" used include compass and all types of electromagnetic radiation, including ultraviolet (UV) radiation (eg, having a wavelength of or about 365, 355, 248,193,157 or 126 nm) and extreme ultra-violet (EUV) radiation (eg, having a wavelength in the range of 5-20 nm), as well as particle beams, such as ion beams or electron beams.
The term "lens", where the context allows, may refer to any one or combination of various types of optical components, including refractive, reflective, magnetic, electromagnetic and electrostatic optical components.
While specific expired of the invention have been described above, it will be appreciated that the invention may be practiced otherwise than as described. For example, the invention may take the form of a computer program containing one or more sequences of machine-readable instructions describing a method as disclosed above, or a data storage medium (eg, semiconductor memory, magnetic or optical disk) having such a computer program stored therein.
Conclusion It is appreciated that the Detailed Description section, and not the Summary and Abstract sections, is intended to be used to interpret the clauses. The Summary and Abstract sections may set forth one or more but not all exemplary of the present invention as contemplated by the inventor (s), and thus, are not intended to limit the present invention and the appended clauses in any way.
The present invention has been described above with the aid of functional building blocks illustrating the implementation of specified functions and relationships. The boundaries of these functional building blocks have been arbitrarily defined for the convenience of the description. Alternate boundaries can be defined as long as the specified functions and relationships are appropriately performed.
The foregoing description of the specific expired will so fully reveal the general nature of the invention that others can, by applying knowledge within the skill of the art, readily modify and / or adapt for various applications such specific expire, without undue experimentation , without departing from the general concept of the present invention, Therefore, such adaptations and modifications are intended to be within the meaning and range of equivalents or the disclosed, based on the teaching and guidance presented. It is understood that the phraseology or terminology is for the purpose of description and not of limitation, such that terminology or phraseology or the present specification is interpreted by the skilled artisan in light of the teachings and guidance.
The breadth and scope of the present invention should not be limited by any of the above-described examples, but should be defined only in accordance with the following clauses and their equivalents. Other aspects of the invention are set out as in the following numbered clauses: 1. A method of measurement or lateral overlay on a substrate or a first marker and a second marker, the method including: measuring on the substrate a property of the first marker that depends on a transverse profile of the first marker; determining, from the measured property of the first marker, information relating to the transverse profile of the first marker; printing, using a lithographic apparatus, the second marker on the substrate including alignment or the second marker on the substrate; measuring a lateral overlay on the substrate or the second marker with respect to the first marker using the determined information. 2. A method according to clause 1, where the step of measuring the property of the first marker comprises: projecting a first radiation beam onto the first marker; detecting first radiation from the first marker using an alignment sensor or the lithographic apparatus; and determining the property of the first marker using the detected first radiation and the step of alignment or the second marker is performed using the alignment sensor. 3. A method according to clause 1 or clause 2, according to the step of determining the information comprises constructing a model or at least a portion or the first marker. 4. A method according to clause 3, where the step of constructing a model or at least a portion of the first marker uses a process model or the first marker. 5. A method according to clause 3 or clause 4, following the step of measuring the lateral overlay comprises constructing a model or a portion of the substrate containing at least a portion of the first and second markers using the model of the at least a portion or the first marker. 6. A method according to any previous clause, including the step of measuring the lateral overlay comprises: projecting a second radiation beam onto the first and second markers; detecting second radiation having interacted with the first and second markers; and determining the lateral overlay using the detected second radiation. 7. A method according to clause 6, the step of projecting the second radiation beam comprises configuring the second radiation beam responsive to the information. 8. A method according to clause 6 or clause 7, the step of detecting the second radiation comprises configuring the detection of the second radiation beam responsive to the information. 9. A method according to any previous clause, further including feeding back the measured lateral overlay to the lithographic apparatus for correction of overlay errors. 10. A lithographic apparatus for processing a substrate including a first marker to print a second marker on the substrate, the lithographic apparatus including: a measurement apparatus configured to measure a property of the first marker that depends on a transverse profile of the first marker, the measurement apparatus including: a first projection system configured to project a first radiation beam onto the first marker; a first detector configured to detect first radiation from the first marker; and a first processor configured to determine the property of the first marker using the detected first radiation, the lithographic apparatus further including: an alignment system configured to control alignment of the second marker on the substrate using the first detector as an alignment sensor; and a second processor configured to determine, from the measured property of the first marker, information related to the transverse profile of the first marker and to output the information from the lithographic apparatus. 11. A lithographic apparatus according to clause 10, the second processor is configured to determine the information by constructing a model or at least a portion or the first marker. 12. A lithographic apparatus according to clause 11, where the second processor is configured to construct a model or at least a portion of the first marker using a process model or the first marker. 13. An inspection apparatus for measuring lateral overlay on a substrate of a first marker and a second marker, the inspection apparatus comprising: a second projection system configured to project a second radiation beam onto the first and second markers; a second detector configured to detect second radiation having interacted with the first and second markers; a third processor configured to determine the lateral overlay using the detected second radiation; and an information receiving module configured to receive information related to the transverse profile of the first marker, the inspection apparatus is configured to measure a lateral overlay on the substrate or the second marker with respect to the first marker using the received information. 14. An inspection apparatus according to clause 13, operable to configure the projection of the second radiation beam responsive to the received information. 15. An inspection apparatus according to clause 13 or clause 14, operable to configure the detection of the second radiation responsive to the received information. 16. An inspection apparatus according to any of clauses 13 to 15, the information received comprises a model or at least a portion or the first marker. 17. An inspection apparatus according to clause 16, where the model or at least a portion of the first marker comprises a process model or the first marker. 18. An inspection apparatus according to clause 16 or clause 17, according to the third-party processor is configured to construct a model or a portion of the substrate including at least a portion of the first and second markers using the model of the at least a portion or the first marker. 19. An inspection apparatus according to any of clauses 13 to 18, further including a feedback module configured to feed back the measured lateral overlay to a lithographic apparatus for correction of overlay errors. 20. A processing apparatus for processing or lateral overlay on a substrate or a first marker and a second marker, the processing apparatus including: a marker property receiving module configured to receive a measured property of the first marker that depends on a transverse profile of the first marker; a measurement receiving module configured to receive a lateral overlay measurement of the first and second markers; and a processor configured to determine, from the received measured property of the first marker, information related to the transverse profile of the first marker and to determine a lateral overlay on the substrate of the second marker with respect to the first marker using the received overlay measurement and the determined information. 21. A processing apparatus according to clause 20, where the processor is configured to determine the information by constructing a model or at least a portion or the first marker. 22. A processing apparatus according to clause 21, where the processor is configured to construct a model or at least a portion of the first marker using a process model or the first marker. 23. A processing apparatus according to any of clauses 20 to 22, further including a feedback module configured to feed back the determined lateral overlay to a lithographic apparatus for correction of overlay errors. 24. A lithographic processing cell comprising: a lithographic apparatus for processing a substrate including a first marker to print a second marker on the substrate, the lithographic apparatus including: a measurement apparatus configured to measure a property of the first marker that depends on a transverse profile of the first marker, the measurement apparatus including: a first projection system configured to project a first radiation beam onto the first marker; a first detector configured to detect first radiation from the first marker; and a first processor configured to determine the property of the first marker using the detected first radiation; the lithographic apparatus further comprising, an alignment system configured to control alignment or the second marker on the substrate using the first detector as an alignment sensor; and a second processor configured to determine, from the measured property of the first marker, information related to the transverse profile of the first marker and to output the information from the lithographic apparatus, the lithographic processing cell further including: an inspection apparatus for measuring lateral overlay on the substrate of the first and second marker, the inspection apparatus including: a second projection system configured to project a second radiation beam onto the first and second markers; a second detector configured to detect second radiation having interacted with the first and second markers; a third processor configured to determine the lateral overlay using the detected second radiation; and an information receiving module configured to receive the information from the lithographic apparatus, the inspection apparatus is configured to measure a lateral overlay on the substrate or the second marker with respect to the first marker using the received information. 25. A computer program product containing one or more sequences of machine-readable instructions, the instructions being adapted for controlling the measuring and determining steps or a method as claimed in any of clauses 1 to 10, in particular to cause one or more programmable processors to: receive a measured property of the first marker that depends on a transverse profile of the first marker; determine, from the received measured property of the first marker, information relating to the transverse profile of the first marker; and measure a lateral overlay on the substrate or the second marker with respect to the first marker using the determined information. 26. A computer program product containing one or more sequences of machine-readable instructions, the instructions being adapted for controlling the lithographic apparatus as claused in any of clauses 10 to 12, in particular to cause one or more programmable processors to: receive a measured property of the first marker that depends on a transverse profile of the first marker; and determine, from the received measured property of the first marker, information related to the transverse profile of the first marker and to output the information from the lithographic apparatus. 27. A computer program product containing one or more sequences of machine-readable instructions, the instructions being adapted for controlling the inspection apparatus as clause in any of clauses 13 to 19, in particular to cause one or more programmable processors to: receive information relation to the transverse profile or the first marker; and measure a lateral overlay on the substrate or the second marker with respect to the first marker using the received information. 28. A computer program product containing one or more sequences of machine-readable instructions for processing or lateral overlay on a substrate or a first marker and a second marker, the instructions being adapted to cause one or more processors to: receive a measured property of the first marker that depends on a transverse profile of the first marker; receive a lateral overlay measurement of the first and second markers; determine, from the received measured property of the first marker, information relating to the transverse profile of the first marker; and determine a lateral overlay on the substrate of the second marker with respect to the first marker using the received overlay measurement and the determined information. 29. A method of measurement or lateral overlay or a first marker and a second marker on a substrate, the method including: measuring on the substrate a property of the first marker that depends on a transverse profile of the first marker; determining, from the measured property of the first marker, information relating to the transverse profile of the first marker; printing, using a lithographic apparatus, the second marker on the substrate including alignment or the second marker on the substrate; and measuring a lateral overlay on the substrate or the second marker with respect to the first marker using the determined information. 30. The method according to clause 29, measuring the property of the first marker comprises: projecting a first radiation beam onto the first marker; detecting first radiation from the first marker using an alignment sensor; and determining the property of the first marker using the detected first radiation, the alignment or the second marker is performed using the alignment sensor. 31. The method according to clause 29, the determining the information comprises constructing a model or at least a portion or the first marker. 32. The method according to clause 31, the constructing model or at least a portion of the first marker uses a process model or the first marker. 33. The method according to clause 31, the measuring the lateral overlay comprises constructing a model or a portion of the substrate including at least a portion of the first and second markers using the model or the at least a portion of the first marker. 34. The method according to clause 29, where the measuring the lateral overlay comprises: projecting a second radiation beam onto the first and second markers; detecting second radiation having interacted with the first and second markers; and determining the lateral overlay using the detected second radiation. 35. The method according to clause 34, the projecting the second radiation beam comprises configuring the second radiation beam responsive to the information. 36. The method according to clause 34, the detection of the second radiation comprises configuring the detection of the second radiation beam responsive to the information. 37. The method according to clause 29, further including feeding back the measured lateral overlay to the lithographic apparatus for correction of overlay errors. 38. A lithographic apparatus configured to process a substrate including a first marker in order to print a second marker on the substrate, including: a measurement apparatus configured to measure a property of the first marker that depends on a transverse profile of the first marker, the measurement apparatus including: a first projection system configured to project a first radiation beam onto the first marker; a first detector configured to detect first radiation from the first marker; and a first processor configured to determine the property of the first marker using the detected first radiation, an alignment system configured to control alignment or the second marker on the substrate using the first detector as an alignment sensor; and a second processor configured to determine, from the measured property of the first marker, information related to the transverse profile of the first marker and to output the information from the lithographic apparatus. 39. The lithographic apparatus according to clause 38, the second processor is configured to determine the information by constructing a model or at least a portion or the first marker. 40. The lithographic apparatus according to clause 39, the second processor is configured to construct a model or at least a portion of the first marker using a process model or the first marker. 41. An inspection apparatus for measuring lateral overlay on a substrate of a first marker and a second marker, the inspection apparatus including: a second projection system configured to project a second radiation beam onto the first and second markers; a second detector configured to detect second radiation having interacted with the first and second markers; a third processor configured to determine the lateral overlay using the detected second radiation; and an information receiving module configured to receive information related to the transverse profile of the first marker, the inspection apparatus is configured to measure a lateral overlay on the substrate or the second marker with respect to the first marker using the received information. 42. The inspection apparatus according to clause 41, the projection of the second radiation beam is responsive to the received information. 43. The inspection apparatus according to clause 41, where the detection of the second radiation is responsive to the information received. 44. The inspection apparatus according to clause 41, the information received comprises a model or at least a portion of the first marker. 45. The inspection apparatus according to clause 44, where the model or at least a portion of the first marker comprises a process model or the first marker. 46. The inspection apparatus according to clause 44, where the third processor is configured to construct a model or a portion of the substrate containing at least a portion of the first and second markers using the model of the at least a portion of the first marker . 47. The inspection apparatus according to clause 41, further including a feedback module configured to feed back the measured lateral overlay to a lithographic apparatus for correction of overlay errors. 48. A processing apparatus for processing or lateral overlay on a substrate or a first marker and a second marker, the processing apparatus including: a marker property receiving means for receiving a measured property of the first marker that depends on a transverse profile of the first marker; a measurement receiving means for receiving a lateral overlay measurement of the first and second markers; and a processor configured to determine, from the received measured property of the first marker, information related to the transverse profile of the first marker and to determine a lateral overlay on the substrate of the second marker with respect to the first marker using the received overlay measurement and the determined information. 49. The processing apparatus according to clause 48, where the processor is configured to determine the information by constructing a model or at least a portion or the first marker. 50. The processing apparatus according to clause 49, where the processor is configured to construct a model or at least a portion of the first marker using a process model or the first marker. 51. The processing apparatus according to clause 48, further including a feedback means for feeding back the determined lateral overlay to a lithographic apparatus for correction of overlay errors. 52. A lithographic processing cell comprising: a lithographic apparatus for processing a substrate including a first marker to print a second marker on the substrate, the lithographic apparatus including: a measurement apparatus configured to measure a property of the first marker that depends on a transverse profile of the first marker, the measurement apparatus including: a first projection system configured to project a first radiation beam onto the first marker; a first detector configured to detect first radiation from the first marker; and a first processor configured to determine the property of the first marker using the detected first radiation; the lithographic apparatus further comprising, an alignment system configured to control alignment or the second marker on the substrate using the first detector as an alignment sensor; and a second processor configured to determine, from the measured property of the first marker, information related to the transverse profile of the first marker and to output the information from the lithographic apparatus; and an inspection apparatus for measuring lateral overlay on the substrate of the first and second marker, the inspection apparatus including: a second projection system configured to project a second radiation beam onto the first and second markers; a second detector configured to detect second radiation having interacted with the first and second markers; a third processor configured to determine the lateral overlay using the detected second radiation; and an information receiving module configured to receive the information from the lithographic apparatus, the inspection apparatus is configured to measure a lateral overlay on the substrate or the second marker with respect to the first marker using the received information. 53. A tangible computer-readable medium having stored thereon, computer-executable instructions that, if executed by a computing device, cause the computing device to perform a method including: receiving a measured property or a first marker that depends on a transverse profile or the first marker; determining, from the received measured property of the first marker, information relating to the transverse profile of the first marker; and measuring a lateral overlay on a substrate or a second marker with respect to the first marker using the determined information. 54. A tangible computer-readable medium having stored thereon, computer-executable instructions that, if executed by a computing device, cause the computing device to perform a method including: receiving a measured property or a first marker that depends on a transverse profile or the first marker; and determining, from the received measured property of the first marker, information relating to the transverse profile of the first marker and to output the information. 55. A tangible computer-readable medium having instructions stored thereon, the instructions including: receiving information regarding a transverse profile or a first marker; and measuring a lateral overlay on a substrate or a second marker with respect to the first marker using the received information. 56. A tangible computer-readable medium having instructions stored thereon, the instructions including: receiving a measured property of a first marker that depends on a transverse profile of the first marker; receiving a lateral overlay measurement of the first marker and a second marker; determining, from the received measured property of the first marker, information relating to the transverse profile of the first marker; and determining a lateral overlay on a substrate of the second marker with respect to the first marker using the received overlay measurement and the determined information.

权利要求:
Claims (1)
[1]
A lithography device comprising: an exposure device adapted to provide a radiation beam; a carrier constructed to support a patterning device, the patterning device being capable of applying a pattern in a section of the radiation beam to form a patterned radiation beam; a substrate table constructed to support a substrate; and a projection device adapted to project the patterned radiation beam onto a target area of the substrate, characterized in that the substrate table is adapted to position the target area of the substrate in a focal plane of the projection device.

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法律状态:
2011-03-30| WDAP| Patent application withdrawn|Effective date: 20110322 |

优先权:

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申请号 | 申请日 | 专利标题

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US18779109P| true| 2009-06-17|2009-06-17|

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US18779109|2009-06-17|

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